This model analyzes an rf mems switch consisting of a thin micromechanical bridge suspended over a dielectric layer. Test out how it can work for you by attending a free handson workshop where a complimentary trial of comsol multiphysics and its modules will be made available for you. For example, novel spring structures have been exploited to reduce the actuation. In the recent past, there have been a number of researches on integrated gas sensors tailored for various applications such as disease detection, pollution monitoring and many more. Electrostatic actuation is the most popular actuation principle. The comsol multiphysics software is used for the designing and simulation of different mems pressure sensors.
Comparative study of cantilever rf mems switch sciencedirect. Femlab heat transfer tutorial rev rowan university. Simulating mems and smart materials with comsol multiphysics. Many of these devices are being used either as actuators or sensors.
A novel inplane electrostatic combdrive actuator for mems relaysswitches was designed and fabricated. Tutorial models have documentation that includes the theoretical background and stepbystep instructions. The design optimization by varying geometry, layer the device without actual fabrication. Apr 02, 2012 donate and download files in full hd here. Comsol multiphysics has wide range of functionalities. Geometry of the rf mems switch as modeled in comsol multiphysics together with the mems module. Aug 17, 2011 optical mems is used for making projectors, optical fiber switch and so on. Read this book if you are new to comsol multiphysics. Multiphysics modeling of mems devices november 20 executive summary 2 mems devices can be categorized based on their functionality and application area. With an interest of providing a cost effective solution, a novel micro. Scribd is the worlds largest social reading and publishing site. The design and simulation of different pressure sensors such as capacitive, piezoelectric and piezoresistive mems pressure sensors are also proposed in this paper. Piezoelectric devices and rf mems available in the mems module, structural mechanics module, and acoustics module mix dielectric, conductive, structural, and. The different types of pressure and its operating principles also included.
The first subsection deals with the description of physical architecture of the gas sensor system. Comsol multiphysics applied to mems simulation and design. The electrical current and the heat flow from one part to the other only through the contact surface. Analysis and simulation of mems based multiple gases. The wet surface feature is used to implement the source term for the water vapor and to. This tutorial shows how to couple three physics interfaces to model evaporative cooling. An automated design tool using comsol multiphysics 3. Mems switch simulation in microwave office tutorials hello yammuna, it is probably more difficult to bring the mems into new mwo environment than to work with standalone aplac. The device was comprised of a fixedfree polysilicon microcantilever beam with electrostatic actuation and capacitive sensing. You can also open a pdf documentation which details the reactor model and a stepbystepprocedure to create this comsol module from scratch.
A novel design of cantilever rf mems series switch iosr journal. Mems switch simulation in microwave office tutorials. Specifically it will be shown how to approach a 3d electrostatics problem by first creating a 2d geometry using the array tools and then extrude it to a 3d geometry. I referred to the tutorial given in mems module for resonator pull in voltage calculation and tried to simulate a switch. This paper presents the basic introduction of mems pressure sensors.
Mems module multiphysics coupling for hygroscopic swelling. Mems pressure sensors have widely used in automotive, biomedical and industrial applications. In this simulation, we look into the fluid velocity, beam stress, force versus time and beam tip displacement in x and y directions. You are also more than welcome to send off a quick question to us and find out more. Comsol lep tutorial for tank flow system two cstr in series step 1. Design of high sensitivity and fast response mems capacitive. Design and fabrication of a reconfigurable memsbased.
Comsol lep tutorial for tank flow system two cstr in series. As i am very new to comsol multiphysics, its very difficult for me to find the procedure for. Thus, have a good understanding on the fluidstructure interaction behavior is critical to guide the mems device design. Following the steps given in the documentation of the comsol heat conduction in a slab tutorial see next page. Comparative study of perforated rf mems switch cyberleninka. Comsol multiphysics software has been used for simulation of mems switches. Steeneken parameter extraction and supportloss in mems resonators, comsol users conference 2007, grenoble. An overview of rf mems switches free download as powerpoint presentation. Comsol multiphysics, finite element analysis fem tool. Right click on the solid mechanics node and select fixed constraint. Design of a memsbased fractal antenna miguel angel galicia martinez this thesis presents the design and fabrication of a customized in house micro electromechanicalsystems mems process based onchip antenna that is both frequency and polarization reconfigurable. Design and simulation of mems based microhotplate as gas sensor. Modelling of different mems pressure sensors using comsol multiphysics.
Department of electronics and communication engineering, periyar maniammai university, vallam, thanjavur 64. The application gallery features comsol multiphysics. This paper presents a novel design of a rf mems switch. You can even use these entries as a starting point for your own. I need some tutorials on mems switch simulation in microwave office. Setting the fixed constraint at the four edges of the diaphragm. Review on analytical design, simulation, fabrication. You can even use these entries as a starting point for your own models that are similar in nature.
However, this could significantly consume huge space on the substrate. For reliable ohmic switch, it is mandatory to select the appropriate contact material for switch. The switch is a capacitive type, which is actuated by an electrostatic force. It also provides a quick introduction to creating applications using the application builder. The effects that need to be taken into account are heat transfer, transport of water vapor, and fluid flow. Despite its simplicity, and the fact that very few engineers would run a structural analysis before trying to turn. The first subsection deals with the description of physical. What is the best way to start with comsol multiphysics. In a switch like this, the bridge responds to an applied electric potential and voltage by pulling down on the film. Mems relaysswitches have been some of the most interesting hotspots in all kinds of mems devices for decades. This work is inspired by the superior performance of electrostatic rf mems switches over the conventional stateoftheart solidstate devices and the potential applications in communication field.
It models the thermal and electrical behavior of two contacting parts of a switch. Modelling of different mems pressure sensors using comsol. This archived webinar shows you that by designing mems devices with numerical simulation, you can achieve the highest possible performance. This work presents the study of spiral rf mems switch which has low actuation voltage due to spiral structure. The application libraries the application libraries are collections of mph files containing tutorial models and runnable applications with accompanying documentation. Computer simulation has been widely used for mems device design. Electrostatic combdrive actuator for mems relaysswitches. This model illustrates how to implement a multiphysics contact. I have a shunt switch simulated under coventor shows pull in. Singh et al analysis and simulation of mems based multiple gases detection system using comsol is based on tube geometry with nanoengineered pores 15, 16. In the comsol multiphysics software any number of physics can be combined in one and the same simulation. Most of the following steps apply on other models 2 p a g e p r e p a r e d b y e n g.
A dc voltage greater than the pullin voltage is applied across the switch, causing the bridge to collapse onto the dielectric layer with a resulting increase in the capacitance of the device. Microcantilever based rf mems switch for wireless communication. Mems microactuators enabling new and unforeseen applications. Model library guide the following table summarizes key information about the entries in this model. Micromirror for optical coherence tomography used in medical diagnosis. Submit a plot similar to figure 52 in the documentation. The finite element model was established by comsol version 5. By creating an accurate model in comsol multiphysics, you will see how the electrical, thermal, structural, and fluid components interact with each other.
To test your mems devices performance and reliability before manufacturing, you can simulate your design using multiphysics software. Finally, the switching performance of the novel cantilever. Simulating semiconductor devices with comsol multiphysics. The equations that comsol solves are displayed in the equation section of the settings window. The paper provides path forwards in reduction of actuation. This systematic approach can save time and cost of device fabrication 5. Capacitive sensors can be virtually designed using a powerful 3d modeling software, comsol. How to calculate the pullin voltage of rf mems switch in. Comsol multiphysics reference guide 19982012 comsol protected by u. Open chapter and click on comsol tab present in the bottom of the page step 2. Click this button to switch to the application builder and start building an application based on your model. Tutorial for running comsol files from comsol website.
Design and fabrication of a novel mems relay with low. How to calculate the pullin voltage of rf mems switch in comsol. Apr 27, 2017 simulating mems and smart materials with comsol multiphysics smart materials are materials whose properties or shape respond dynamically to stimuli in their environment. Most of the previous designs were based on the microarray type. It provides the user with the flexibility to model the sensor using a simple 2d user interface that can be easily transformed into a 3d model. Modelling of different mems pressure sensors using. Rfmems is used for making antennas, filters, switches, relays, rams microphones, microphones, and so on. For example, piezoelectric materials experience strain under an applied electric field, while magnetostrictive materials deform in the presence of a magnetic field. Tutorial for running comsol files from comsol website step 1. Need help in rf mems switch simulation using comsol. As mems switches are widely used in different actuation of electrostatic, electromagnetic. The simulation is done using comsol multiphysics software.
The equations change based on the equation form selected. To access any comsol files, you need to have a comsol account which can be created for free. It provides an overview of the comsol environment with examples that show you how to use the comsol desktop user interface and the model builder. In this application note, only the electrostatics part of mems module will be discussed. Tutorial on comsol multiphysics platform comsol is a multiphysics platform, which will be used to do all your simulations. Design, simulation and a comparative study of square, rectangular. Modeling using the graphical user interface3d example. Rather, than reading books on comsol, i suggest please start using comsol because when you will start, you will find many errors, may be physics. I am new to comsol, does anyone know how to simulate rf mems switch in comsol. Modeling mems and piezoelectric devices comsol multiphysics.
Rf dc contact mems switch for reconfigurable antennas. In this appendix, we show how to do the following using comsol step by step. The analysis is exemplified on a combination wrench during the application of torque on a bolt. An accelerometer is an electromechanical device that is used to measure acceleration and the force producing it. The structure of the switch consists of a cpw coplanar waveguides transmission lines and a suspended membrane. In this paper we simulated the cantilever switch with various shapes. Comsol, the comsol logo, comsol multiphysics, comsol desktop, comsol compiler, comsol server. We first start with an example on a very simple electrostatic actuated rf mems switch. The contact switch device has a cylindrical body and plate hook shapes at the contact area. Mems accelerometeracceleration transducer,sensor,working. Chapter 6 contact studies for reliable ohmic switch. Click on comsol access present at the bottom of the page. Comsol multiphysics applied to mems simulation and design dr. Electromagnetics modeling in comsol multiphysics the acdc and rf modules.
Runnable applications have instructions on how to use the application. Comsol is the perfect tool for simulating mems and piezoelectric devices and applications. Multiphysics modeling of mems devices november 20 executive summary power is increased with dedicated tools. Electromagnetics modeling in comsol rf module highfrequency modeling. A perfectly matched layer is used to represent the essentially infinite substrate. Since the switch is symmetrical, its only necessary to model one quadrant of the geometry. Furthermore, this example may also be defined and modeled using components. Comsol, comsol multiphysics, comsol script, comsol reaction engineering lab, and femlab are registered. Design of high sensitivity and fast response mems capacitive humidity sensor using comsol multiphysics r. This tutorial demonstrates how to set up a simple static structural analysis. If you work with microelectromechanical systems mems, integrating the various physics is a key concern. I have been trying to find out the pull in voltage of a very basic cantilever based mems switch. Contact studies for reliable ohmic switch as discussed in introduction of rf mems ohmic switches, the major problem in ohmic switches is the contact degradation. Design and simulation of mems based microhotplate as gas.
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